The refractory metals and refractory metal silicides that are used to augment or replace the polysilicon are generally deposited by physical vapor deposition processes. 用于增强和取代多晶硅的难熔金属和难熔金属硅化物通常是用物理蒸发沉积工艺沉积的。
The friction and wear-resistance under varied temperture was studied for the Si_3N_4 and BN ceramic strengthen refractory steels by plasma chemical vapour deposition at low temperature. 研究了等离子低温化学气相沉积Si3N4,BN陶瓷膜强化耐热模具钢在不同温度下的摩擦磨损特性。